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G1122 Pages: 2

PART (^
Answer any two full questions,each carries 20 marks.
Discuss the criteria for selecting materials for the masks used in etching.
Give five relevant points of comparison between bulk வாம்‌ surface
micromachining.
What is meant by BioMEMS. Discuss the challenges involved in BioMEMS. List
three applications of BioMEMS.
Explain with figure the DRIE and Plasma etching
Explain Anodic bonding and Silicon Fusion Bonding.
Explain the levels of micro system packaging.

Explain with figures two application which use NEMS technology

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