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G1122 Pages: 2

APJ ABDUL KALAM TECHNOLOGICAL UNIVERSITY
SEVENTH SEMESTER B.TECH DEGREE EXAMINATION(S), MAY 2019

Course Code: EC465
Course Name: MEMS

PARTA

Answer any two full questions, each carries 15 marks.
State five characteristics of micro sensors and actuators
With reference to pure bending of longitudinal beam, derive the expression for the
magnitude of applied bending moment.
State a commercial product which uses MEMS technology. Explain with figures
its operating principle of the product.
Explain the purpose of micro cantilevers in MEMS systems. What is the
relevance of spring constant (k) of the mechanical structure in the micro system?
Explain with figures the working principle of micro grippers.
Explain Lorentz force. Explain the operating principle of magnetic actuators with
relevant figures.

PART ‏تا‎

Answer any two full questions, each carries 15 marks.
State the constraints in pumping fluids in micro channels. What pumping scheme
is usually used in micro fluidics, give one example.
State three relevant properties of Silicon Carbide and Silicon Nitride for use in
Microsystems.
With relevant figures/ schematics state one application of Silicon Piezo resistors.
Explain the steps involved in photolithography. State the chemicals used in each
of the stages along with the operating conditions.
Explain the oxide growth process in Silicon with relevant figures.
With reference to scaling of electromagnetic forces, derive the expressions for

electromagnetic potential energy and force.

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Duration: 3 Hours

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