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APJ ABDUL KALAM TECHNOLOGICAL UNIVERSITY
Third Semester M.Tech. Degree Examination, Dec 2017
Electronics and Communication
Telecommunication Engineering
OIEC 7517: RF MEMS

Max. Marks: 60 Duration:3 Hours

(Answer any two questions from each Part)

PARTA
| - 2) List the various application of RF MEMS.

b) Explain the various Actuation mechanisms for MEMS devices.
2. a) With necessary diagram explain the fabrication of pressure sensor.
b) Explain the intrinsic characteristics of MEMS.

3. a)Distinguish between surface and bulk micromachining.

b) Explain DRIE process with suitable diagram.
PART B

4. a)Discuss the various switch parameters that are to be considered
whiledesigning MEMS
for high frequency applications.

b) Explain the various switching configuration in an RF circuit.
5. a)Discuss the various contact mechanisms for RF switches.

b) Explain various configuration ofPIN diode RFswitches.
6. a) Explain the RF design considerations to be taken into account while designing
RF switch.

b) List out the integrating and biasing issues for RF switches.

PART ‏ع‎

7.
a) List out the various considerations in the design of planar inductors.

b) With suitable diagrams explain the construction and operation of
solenoid inductors.

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