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04000EE404052001

PART (^
Answer any two full questions, each carries 10 marks.
Describe the steps involved in bulk micromachining fabrication of MEMS.
List any four types of MEMS actuators along with their applications.
How is photolithography used in the micro machining process of MEMS.
Compare Dry and wet etching in micromachining of MEMS.
Explain the concept of graphical programming in virtual instruments.
List the techniques used in micromachining.
PART D
Answer any two full questions, each carries 10 marks.
Explain the concept of latching in PLC. Draw the ladder diagram for
realising AND & OR logic using PLC.
Explain the different input output used in PLC.
Explain with an example the working of counters in PLC.
Describe the various electrical actuators used in automation.
Explain the architecture of an industrial automation system.

Explain the working principle of a pneumatic actuator.

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